ISO 14644-9 Final Draft Standard released

Published: 19-Jul-2010

Standard describes classification of particle contamination levels on solid surfaces in cleanrooms


ISO 14644-9 Cleanrooms and associated controlled environments—Part 9: Classification of surface cleanlinesss by particle contamination is now a Final Draft International Standard (FDIS).

The US Institute of Environmental Sciences and Technology (IEST) says the content of the standard, which describes the classification of particle contamination levels on solid surfaces in cleanrooms and associated controlled environment applications, has been refined and reorganised for greater efficiency and ease of use.

According to IEST, this part of ISO 14644 will benefit personnel working in or managing cleanrooms, as it applies to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment, and devices. The surface particle cleanliness (SPC) classification is limited to particles between 0.05µm and 500µm. Surface cleanliness depends on material and design characteristics, stress loads (complexity of loads acting on a surface), and prevailing environmental conditions, along with other factors.

Measurement methods of the classification should be adapted for surface characteristics (such as porosity, roughness, electrostatic charge, and surface energy). Recommendations on testing and measuring methods as well as information about surface characteristics are given in informative annexes.

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