The MCN is the Victoria node of the Australian National Fabrication facility (ANFF), a collaborative initiative between the Australian federal government, the Victoria state government, CSIRO and major universities in Victoria.
The MCN cleanroom is approximately 1,000m² in area and will be divided into two cleanroom classifications: class 100 and class 10000. It will house equipment such as electron beam lithography, scanning electron microscopy, reactive ion etching (Oxford ICP tools), physical vapour deposition (including Oxford PECVD tool), atomic force microscopy (AFM), polymer electronics module, photolithography and nanoimprint lithography. Outside the cleanroom MCN also has dual-beam microscopy and biochem labs featuring confocal and optical microscopy, biological AFM and PDMS and nanoparticle laboratories. MCN will support a wide variety of research including solid-state electronics, micro/nanofluidics, photonics sensors and biological interrogation of cells and molecules.
Oxford Instruments designs, supplies and supports high technology tools, processes and solutions with a focus on physical science, bioscience, environmental and industrial research and applications. The first technology business to be spun out from Oxford University more than 40 years ago, Oxford Instruments is now a global company with more than 1,300 staff worldwide.
www.nano.monash.edu.au www.oxford-instruments.com
