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Plasmalab systems from Oxford Instruments go down under
Oxford Instruments Plasma Technology (OIPT), based in Yatton, Bristol, UK, has received a three-system order from the Melbourne Centre for Nanofabrication (MCN) in Australia. The systems, two Plasmalab System100 ICP380 tools and a Plasmalab System100 PECVD, have been bought as part of MCN’s programme to equip its cleanrooms with instrumentation for nano and micro-scale fabrication.