Airkey, a leading Chinese cleanroom manufacturer, proudly presents the well-accepted modular cleanrooms for semiconductor industry to learn more about what to expect from and what we can do in modular cleanroom design and construction.
Project highlights
ISO CLASS:
- ISO 6 and ISO 7 (Class 1000 and Class 10,000): Serving as the background environment, these areas include change rooms and airlock rooms for personnel and material flow. ISO 4 and ISO 5 (Class 10 and Class 100): Modular cleanrooms dedicated to critical semiconductor processes, featuring ESD-safe materials and specialised lighting.
Advanced construction materials:
- The ISO 6/ISO 7 areas are constructed with 50mm thick sandwich panels for durability and insulation, with 75mm thick air return panels to ensure efficient airflow management, maintaining stable pressure differentials.
- ESD acrylic panels (transparent, white, and yellow-tinted) for ISO 4 and ISO5 cleanroom walls, prevent electrostatic discharge (ESD) risks in sensitive semiconductor processes, offering both visibility and static control.
- ESD PVC flooring to dissipate static charges safely.
- Yellow lighting with specialised filters that block wavelengths below 530nm(eliminating over 99.9% of harmful light contamination).
Smart HVAC & air filtration system
- EC (Electronically Commutated) FFUs: Energy-efficient fan filter units with centralised touch-screen control for real-time monitoring and adjustment.
- Airkey HVAC System: Maintains precise temperature, humidity, and pressure levels, ensuring stable production conditions.
- Centralised Touch-Screen Control: Operators can monitor and adjust FFU speed, airflow, and environmental parameters seamlessly.
Website: www.airkeyx.com
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