Picarro expands cleanroom gas analyser range

Published: 3-Apr-2018

The SI2000 Series gas analysers perform continuous real-time airborne molecular contamination monitoring of reactive gases from mid-PPB to PPM concentration levels

Picarro, a US-based gas and isotopes measurement specialist, has announced its SI2000 Series gas analysers now feature extended range measurement capability on semiconductor environmental and cleanroom applications.

The company said that for hydrogen fluoride (HF), ammonia (NH3) and hydrogen chloride (HCl), the SI2000 Series analysers provide extended measuring range from mid parts per billion (PPB) to parts per million (PPM) concentration levels.

This extended range allows the analysers to meet expanded cleanroom air environmental applications, such as Sub-FAB floor and plenum area installations, as well as additional FOUP process monitoring applications, including photolithography and etching.

Thomas Owano, chief product officer at Picarro, said: "Multiple sizeable investments in Picarro SI2000 analysers by major semiconductor electronics manufacturers around the world confirm the value of real-time, high-speed continuous AMC monitoring by Picarro’s CRDS analysers in improving yield in their production processes."

These analysers feature Picaro's cavity ring-down spectroscopy (CRDS), a patented and proven-in-use technology that enables an effective measurement path length of up to 20 km in a compact cavity of 35 cc in volume.

SI2000 Series analysers also features SEMI and IEC standards compliance, easy installation and very low cost of annual maintenance compared to any other airborne molecular contamination (AMC) monitoring technique, the company said.

Headquartered in Santa Clara, California, Picarro develops solutions to measure greenhouse gas (GHG) concentrations, trace gases and stable isotopes across many scientific applications and industrial markets.

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