Entegris introduces Torrento X Series 7nm filtration with FlowPlane linear technology

The first in a series of filters based on linear filtration technology, the FlowPlane S model is for point of dispense (POD) applications

The FlowPlane linear technology with the advanced Torrento X series 7nm filter enables advanced wet cleaning applications for the 10nm node and beyond

Entegris, a US provider of contamination control products and materials handling technologies for advanced manufacturing environments, has introduced the Torrento X Series 7nm filters with FlowPlane linear filtration technology.

The company says FlowPlane is the semiconductor industry’s first scalable, linear, high-flow filtration platform enabling advanced wet cleaning applications for the 10nm node and beyond.

The first in a series of filters based on linear filtration technology, the FlowPlane S model is for point of dispense (POD) applications, enabling improvements in both on-wafer defects and yield for critical wet cleaning applications.

Clint Haris, Vice-President of the Liquid Microcontamination Control business unit at Entegris, said: 'Filter design must evolve to meet the needs of the most complex semiconductor manufacturing processes. A filter is the last line of defence to prevent defect-causing contaminants from reaching the wafer. Our smaller, more powerful filtration solution will enable our customers to effectively implement their 10 and 7nm technology nodes.'

Torrento X series 7nm filters with FlowPlane linear filtration technology improve retention and increase flow rate performance by 100% compared with similarly sized radial filters, the company said.

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