The NanoAir 10 is a purpose-built 10 nm aerosol particle counter that enables the detection of yield impacting particles from within process tools, across critical cleanroom areas, and in pressurised high-purity gas
The NanoAir 10 is a revolutionary new aerosol nanoparticle counter from Particle Measuring Systems (PMS) offering the sensitivity and accuracy of a Condensation Particle Counter (CPC) with the ease of use and functionality of a traditional cleanroom particle counter. It is designed to monitor ultra-clean environments and provides 10 nm detection sensitivity with a sample flow rate of 2.8 L/min.
The new NanoAir 10’s size is 83% smaller than competitive products making it practical to use anywhere in ultra-clean environments, including inside semiconductor process tools and equipment front-end modules (EFEM). The innovative working fluid handling system design is robust and efficient, enabling 24/7, 365 days of continuous operation without the need for user intervention of any kind, between the annual working fluid refill and calibration. Additionally, the NanoAir 10 is high-pressure gas compatible when used with the PMS HPDTM III - High Pressure Diffuser. Data can be viewed, analysed, and reported using PMS facility monitoring software or transmitted directly to third-party SCADA systems or process tool inputs using MODBUS or 4-20mA output.
Used in conjunction with the NanoAir 10, the companion, ParticleSeeker, 10-port smart manifold enables applications where multiple sample locations are required. The ParticleSeeker allows the NanoAir 10 to monitor up to 10 sample points using fully programmable sequences.
“Only Particle Measuring Systems brings you a 10 nm purpose-built aerosol particle counter designed specifically for use in the most critical fab spaces, and for applications that now include monitoring inside process tool minienvironments.”, said Isidro Sanchez, Electronics Global Product Line Manager at Particle Measuring Systems. He continued, “The remarkably compact form factor of the NanoAir 10, and companion ParticleSeeker smart manifold, now provide Electronics Manufacturers and Gas Suppliers the ability to monitor aerosol particles down to 10 nm in areas that were previously very difficult to reach. The NanoAir literally extends the reach of our reliable and innovative aerosol product line to improve both yield and output for our customers.”