$31 million US facility

Published: 5-Mar-2002


Axcelis Technologies, Inc. have opened a new Advanced Technology Center, a 140,000-square-foot facility dedicated to next-generation semiconductor process development, product demonstration and customer training.

Axcelis invested $31 million in the new building, located adjacent to corporate headquarters in Beverly, Massachusetts. Former U.S. Secretary of Labor and Massachusetts Democratic gubernatorial candidate Robert Reich joined several local dignitaries in the opening of Axcelis' new facility. Reich, a long-time advocate of high-technology education and workforce development programs, delivered the keynote address. "Axcelis' Advanced Technology Center sets an example for where the Massachusetts economy must continue to go if we are going to be competitive with other states in the decades to come," Reich said. The Advanced Technology Center will give customers access to Axcelis' equipment and process applications expertise, supporting them with core transistor formation technology as well as the advanced cleaning and curing techniques used in semiconductor production.

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