Beneq completes new cleanroom facility

Published: 21-Dec-2020

The new ISO 7 cleanroom will be dedicated to manufacturing ALD equipment for semiconductor and other markets with similar cleanroom requirements

We have completed construction of a brand-new cleanroom and application laboratory at its corporate headquarters in Espoo, Finland. The new Espoo, Finland facility includes a 350 sqm ISO 7 cleanroom and a 150 sqm ISO 5 semiconductor ALD application laboratory.

Built with the latest cleanroom design and construction technology, the new facility adds approximately 350 sqm of ISO 7 cleanroom floor space at Beneq's headquarters. It will be used for product and process development, equipment assembly, prototyping, and testing services.

"Since the launch of the Beneq Transform last year we have seen great demand for our ALD equipment products from semiconductor customers," said Dr Tommi Vainio, VP of ALD at Beneq. "Together with the semiconductor application laboratory the new cleanroom will be the engine for Beneq's rapid growth in More-than-Moore markets, including power semiconductors, RF, image sensors, MEMS, compound semiconductors, LED & Micro-LED, OLED, and more."

The new cleanroom is part of Beneq's ISO 9001 certified processes. It also houses a modern 150 sqm semiconductor application laboratory, solely designed for developing and prototyping ALD solutions for More-than-Moore applications. Beneq has also expanded its existing cleanroom facility to ensure the highest availability and new safety features.

The new cleanroom officially entered into production in December 2020. Prior to this facility the company had 1900 sqm of existing cleanroom capacity, which it will continue to operate for other customer markets.

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