HEPA oven for Europe

Published: 12-Feb-2003


A clean process oven, which is said to offer high-performance HEPA filtration for processes where minimal contamination is essential, has been introduced to Europe by UK-based Alliance Sales (Europe).

The Despatch Industries LCC 2-14 recirculates airflow horizontally and the recirculated air is 100% HEPA filtered. It has a capacity of 396 litres and a maximum temperature of 260°C. Finished with a stainless steel interior and exterior, the oven is available in three configurations: Inert Atmosphere, Class A Atmosphere and Air Atmosphere. It meets CE and SEMI S2 standards. Alliance has also announced the European debut of the Despatch AST-1100 Automated Photoresist Bake Tool, a thermal process tool designed for wafer processing of 200mm or 300mm wafers. The company says it has been developed to increase throughput and eliminate handling errors while conserving floor space. The tool maintains uniformity of ±1.00°C within each wafer and throughout all 25 wafers in the thermal chamber at soak.

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