IEST recommend practice on outgassed organic compounds

Published: 3-Apr-2008

New Recommended Practice (RP) from the Institute of Environmental Sciences and Technology (IEST) describes a method for characterising organic compounds outgassed from materials or components exposed to air or gases in cleanrooms and other controlled environments.


The IEST-RP-CC031.2: Method for Characterizing Outgassed Organic Compounds from Cleanroom Materials and Components is relevant to industries that may experience adverse production yields as a result of gaseous organic contamination, also known as volatile organic compounds (VOCs) and semivolatile organic compounds (SVOCs). In the semiconductor on hardware, products, and wafer surfaces is recognised as a source of processing problems and hardware failures. In aerospace, the presence of molecular contamination can significantly degrade spacecraft performance goals and hasten end-of-life projections.

This RP provides both a semiquantitative determination and a qualitative identification of a large range of compounds. The method is designed to screen primarily cleanroom materials but can also be applied to materials used in other controlled environments for identification of outgassed compounds detectable by dynamic headspace gas chromatography-mass spectrometry (GC-MS).

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