MES software hooked up with SPC system
Brooks-PRI Automation Inc has integrated camLine's SPACE statistical process control product with its FACTORYworks MES software suite.
"SPACE's real-time product, process and tool statistical process control capabilities are now fully integrated with FACTORYworks," said Mike Smith, vice-president and general manager of the MES Business Unit. "SPACE provides the broadest set of SPC functionality available in the semiconductor industry today. It is production-proven in several semiconductor facilities worldwide." The integrated product is said to be unique in that it provides a solution to the whole process excursion problem. "It promptly detects exceptions, contains the problem and provides operators with troubleshooting guides to correct problems."