Mykrolis exports systems to Taiwan

Mykrolis Corporation, the supplier of components and subsystems to the semiconductor industry, has shipped four Aeronex Infinity gas purification systems to a major epi-wafer manufacturer located in Tainan, Taiwan. The two EGPS12 I Series, an EGPS12 H Series, and an EGPS8 SK Series will purify process nitrogen, hydrogen, and ammonia in the production of LED chips and reduce production costs and achieve a higher and more consistent production yield. "As part of Mykrolis's overall strategy to continue expanding its Asia customer base, this selection of Aeronex systems is a breakthrough in meeting overall MOCVD bulk purification needs in H₂, N₂, and NH₃," said Jay Hamidi, director of technology for Mykrolis' gas microcontamination control business. Dual-bed, self-regenerating Aeronex Infinity gas purification systems deliver a continuous supply of pure gas and remove contaminants to sub-ppb levels.