Thermo Fisher 300mm FT-IR metrology tool offers highest cleanliness standards
Thermo Fisher Scientific’s latest FT-IR metrology system, the Thermo Scientific ECO 3500, benefits from the highest industry standards of cleanliness in microenvironments.
Designed for seamless integration into automated wafer handling facilities, it incorporates a unique Spartan equipment front-end solution from Asyst Technologies and features a proven spectrometer and enhanced analytical software.
According to Thermo Fisher Scientific, the ECO 3500 is a complete lab-to-FAB solution. An enhanced software interface provides full SEMI E95 compliant access for process engineering, research and production monitoring applications. Improved wafer handling capabilities include two in-line load ports and a new high precision edge grip stage that brings an even higher degree of accuracy and repeatability to the product line.
It is said to be the only FT-IR metrology tool to use Asyst Technologies’ new, state-of-the-art EFEM rated ISO class 1 for particle contamination, exceptional operational speed and simplified mechanical design. The unique dual end-effector configuration with two 300mm in-line load ports speed up the wafer transfer process between the FOUP (front opening unified pod) and the wafer stage and optimizes sample throughput.