When it needs to be pure...

Published: 13-Apr-2004


Donaldson Company's High Purity Products (HPP) group has launched its Lithoguard-12 filtration system to supply high purity air to the latest technology semiconductor processing tools in the lithography area. Production units are scheduled for delivery this month. Development of the system was triggered by customer demand for economical, comprehensive control of airborne contamination. This increasingly degrades expensive optical elements in lithography tools and adversely affects critical chemical processes used in the manufacture of semiconductor chips. A small footprint, high efficiency system was developed in which a maximum of chemical filtration capacity can be installed. Chemical filter inserts are configured to minimise the possibility of contaminant breakthrough as well as to maximise overall media utilisation. The chemical media is targeted to the removal of acidic and basic gases, as well as the removal of volatile organic compounds (VOCs).

T: +1 952 887 3841 kmcdonal@mail.donaldson.com

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