SEMI S 2 revision improves safety

Published: 11-Jun-2003


Safe automation technology specialist, Pilz, says the recent revision of the internal industry standard SEMI S 2 opens up new opportunities for the safe control and monitoring of plant and machinery in the semiconductor industry.

Based on this revision, the company says it is now possible to use electronic safety solutions such as programmable safety systems or safe bus systems. The revisions were drawn up by working groups within SEMI, in which Pilz had a major involvement. As a result, the standard SEMI S 2 now includes a supplementary document R 14, which takes into account the current state of safety technology. Pilz says this means that users can now exploit those benefits of modern safety technology that are based on the use of semiconductor technology – wear resistance, long service life and high availability. Safety measures for monitoring plant and machinery can also be improved significantly, says the company, including, for example, the safe monitoring of gas and liquid flows which will prevent malfunctions within the process, helping to reduce the reject rate.

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