Tiger Optics launches continuous cleanroom analyser

Published: 14-Jul-2008

US-based manufacturer of laser-based trace gas analysers, Tiger Optics has launched the Tiger-i for cleanroom applications.


With absolute accuracy and immediate, calibration-free analysis, the Tiger-i line of analysers provides a superior approach to monitoring cleanroom ambient air for gas phase airborne molecular contaminants (AMCs) that increasingly compromise manufacturing process quality and yield, says the company.

The Tiger-i line employs Tiger Optics' patented Continuous Wave Cavity Ring-Down Spectroscopy (CW-CRDS). It measures into parts per trillion (ppt) levels of trace hydrofluoride (HF) and hydrochloride (HCl) gases, which, combined with ammonia or amines, can lead to contamination and overall quality breakdown. A built-in reference cell and automated tune function of the Tiger-i provides 99.9% uptime without calibration, consumables or maintenance.

By enabling manufacturers to quickly and reliably correlate events, such as tool issues, chemical spills, material outgassing and even loadlock openings, process yields can be continuously optimised for maximum business value. "Keeping its eye on the needs of the cleanroom market, Tiger Optics has revolutionised the industry's approach to ambient air measurement," said Lisa Bergson, ceo of Tiger Optics. "The cleanroom industry, through the Tiger-i, can better achieve maximum uptime and yield, and look forward to continued growth in the potential of CW-CRDS technology."

The cleanroom analyser is currently available in two platforms - the Tiger-i 1000 and the Tiger-i 2000. The Tiger-i 1000 HF and HCl analysers employ a split architecture that allows users to place sensor modules up to 50m away from the central analyser, and is based on the extensive success of the company’s LaserTrace line of analysers.

The Tiger-i 2000 HF and HCl analysers provide a compact, integrated architecture for enhanced analysis with a smaller footprint, and is based on the award-winning HALO line of mini-CRDS analysers.

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