Ultra-high purity diaphragm valve delivers extended life

Published: 21-Mar-2007


A new fluoropolymer diaphragm valve from the Partek operation of Parker Hannifin claims to simplify the flow control of slurry and aggressive fluids in semiconductor and clean-area applications.

Called the 20 Series, the valve features a flow path and valve seat area that optimises fluid flow dynamics, for minimal pressure drop and enhanced flow rates, and resistance to aggressive media. As a result, the 20 Series valve offers a life of more than a million cycles in slurry applications - a greater than 50% improvement over Partek's standard DI water/chemical valve technology.

Compliant with the SEMI-F57-0301 standard for polymer components, Partek's new valve has a body machined from virgin 100% ultra-high purity PTFE for superior chemical resistance, and a one-piece, precision-machined diaphragm. The design of the valve is optimised to save critical cleanroom and sub-fab space. Both manual and pneumatically actuated configurations are available.

The design makes the valve particularly suitable for handling abrasive and corrosive slurry fluids, such as such those found in the CMP (chemical-mechanical planarisation or chemical-mechanical polishing) processes employed in semiconductor fabrication. The valve is also suitable for a wide range of other clean area processing and analytical applications, such as controlling the flow of acids, chemicals, and DI water.

Parker Hannifin's Partek operation manufactures flow control products for use in fluid systems where corrosion protection is required or where media purity must be safeguarded. The wetted surfaces of all products are of chemically inert, corrosion-resistant PFA (perfluororalkoxy) or PTFE (polytetrafluoroethylene). Products include valves, manifolds, fittings, pressure regulators, flow meters, pumps and spray guns, for use in semiconductor processing, and other high purity applications including chemical, food and pharmaceutical processing, and biomedical and analytical instrumentation.

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