Fast and accurate laser ellipsometer thinks thin
Jobin Yvon's PZ2000 laser ellipsometer claims to deliver rapid, high accuracy characterisation of thin and ultrathin structures. The instrument has good reproducibility, exhibiting sub-Angstrom standard deviation over one year for NIST reference wafers. Options for the instrument include 10micron x 30micron spot size for characterising patterned samples, with a high-speed sample mapping stage for checking sample uniformity. A reflectometer option provides the capability for characterising films from Angstrom thickness to 50micron , while the use of up to three wavelengths eliminates film thickness ambiguity as well as increasing sample information for absorbing film analysis. The PZ2000 provides accurate characterisation of film thickness and optical constants for a wide range of transparent and absorbing film structures commonly encountered in biotechnology, semiconductor, photonic, polymer, optical coating and display applications.